Predictive Modeling for Advanced Virtual Metrology: A Tree-Based Approach

Yang Liu, Xin Li. Predictive Modeling for Advanced Virtual Metrology: A Tree-Based Approach. In 23rd IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2018, Torino, Italy, September 4-7, 2018. pages 845-852, IEEE, 2018. [doi]

@inproceedings{LiuL18-83,
  title = {Predictive Modeling for Advanced Virtual Metrology: A Tree-Based Approach},
  author = {Yang Liu and Xin Li},
  year = {2018},
  doi = {10.1109/ETFA.2018.8502480},
  url = {https://doi.org/10.1109/ETFA.2018.8502480},
  researchr = {https://researchr.org/publication/LiuL18-83},
  cites = {0},
  citedby = {0},
  pages = {845-852},
  booktitle = {23rd IEEE International Conference on Emerging Technologies and Factory Automation, ETFA 2018, Torino, Italy, September 4-7, 2018},
  publisher = {IEEE},
  isbn = {978-1-5386-7108-5},
}