Wenli Liu, Yujie Lu, Zeji Chen, Qianqian Jia, Junyuan Zhao, Bo Niu, Wei Wang 0172, Yalu Hao, Yinfang Zhu, Jinling Yang, Fuhua Yang. A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10, 000. Sensors, 23(8):3808, 2023. [doi]
@article{LiuLCJZN0HZYY23,
title = {A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10, 000},
author = {Wenli Liu and Yujie Lu and Zeji Chen and Qianqian Jia and Junyuan Zhao and Bo Niu and Wei Wang 0172 and Yalu Hao and Yinfang Zhu and Jinling Yang and Fuhua Yang},
year = {2023},
doi = {10.3390/s23083808},
url = {https://doi.org/10.3390/s23083808},
researchr = {https://researchr.org/publication/LiuLCJZN0HZYY23},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {23},
number = {8},
pages = {3808},
}