A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10, 000

Wenli Liu, Yujie Lu, Zeji Chen, Qianqian Jia, Junyuan Zhao, Bo Niu, Wei Wang 0172, Yalu Hao, Yinfang Zhu, Jinling Yang, Fuhua Yang. A GHz Silicon-Based Width Extensional Mode MEMS Resonator with Q over 10, 000. Sensors, 23(8):3808, 2023. [doi]

Abstract

Abstract is missing.