Van-Tsai Liu, Chien-Hung Liu, Tsai-Yuan Chen, Chun-Liang Lin, Yu-Chen Lin. Tracking Control of the Z-Tilts Error Compensation Stage of the Nano-measuring Machine Using Capacitor Insertion Method. In De-Shuang Huang, Laurent Heutte, Marco Loog, editors, Advanced Intelligent Computing Theories and Applications. With Aspects of Theoretical and Methodological Issues, Third International Conference on Intelligent Computing, ICIC 2007, Qingdao, China, August 21-24, 2007, Proceedings. Volume 4681 of Lecture Notes in Computer Science, pages 616-625, Springer, 2007. [doi]
Abstract is missing.