Xinfu Liu, Jinhe Liu, Zhanping Du, Quanming Zhao, Junying Zhao, Yuhui Huang. The Research on Non-destructive Testing Method of Sheet Resistance in Micro Area of Silicon Wafer Based on EIT Technology. In Jeng-Shyang Pan, Xiamu Niu, Hsiang-Cheh Huang, Lakhmi C. Jain, editors, 4th International Conference on Intelligent Information Hiding and Multimedia Signal Processing (IIH-MSP 2008), Harbin, China, 15-17 August 2008, Proceedings. pages 1494-1497, IEEE Computer Society, 2008. [doi]
Abstract is missing.