Yu Liu, Xiuhan Li, Dong-Ming Fang, Haixia Zhang. RF MEMS filter based on one step of copper electroplating. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 945-949, IEEE, 2010. [doi]
@inproceedings{LiuLFZ10,
title = {RF MEMS filter based on one step of copper electroplating},
author = {Yu Liu and Xiuhan Li and Dong-Ming Fang and Haixia Zhang},
year = {2010},
doi = {10.1109/NEMS.2010.5592111},
url = {http://dx.doi.org/10.1109/NEMS.2010.5592111},
researchr = {https://researchr.org/publication/LiuLFZ10},
cites = {0},
citedby = {0},
pages = {945-949},
booktitle = {5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010},
publisher = {IEEE},
}