Automatic target defect identification for TFT-LCD array process inspection using kernel FCM-based fuzzy SVDD ensemble

Yi-Hung Liu, Szu-Hsien Lin, Yi-Ling Hsueh, Ming-Jiu Lee. Automatic target defect identification for TFT-LCD array process inspection using kernel FCM-based fuzzy SVDD ensemble. Expert Syst. Appl., 36(2):1978-1998, 2009. [doi]

Abstract

Abstract is missing.