Robust and precision motion control system of linear-motor direct drive for high-speed X-Y table positioning mechanism

Zuo Zong Liu, Fang Lin Luo, M. Azizur Rahman. Robust and precision motion control system of linear-motor direct drive for high-speed X-Y table positioning mechanism. IEEE Transactions on Industrial Electronics, 52(5):1357-1363, 2005. [doi]

Abstract

Abstract is missing.