Active Disturbance Rejection Control of a 2D MEMS Micromirror with Sidewall Electrodes

Ping Liu, Weijie Sun, Zhendong Sun. Active Disturbance Rejection Control of a 2D MEMS Micromirror with Sidewall Electrodes. Unmanned Systems, 4(1):35-40, 2016. [doi]

Abstract

Abstract is missing.