Wenjing Liu, Yongming Tang, Baoping Wang. Reliability evaluation of micromirror of double S-shaped unimorph piezoelectric actuator with probabilistic approach. In 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2013, Suzhou, China, April 7-10, 2013. pages 813-816, IEEE, 2013. [doi]
Abstract is missing.