AlN Hybrid-Coupled Resonator With Phononic Crystal Reflector

Kangfu Liu, Yuxi Wang, Tao Wu. AlN Hybrid-Coupled Resonator With Phononic Crystal Reflector. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1517-1520, IEEE, 2021. [doi]

Abstract

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