Improving the Sensing Properties of Graphene MEMS Pressure Sensor by Low-Temperature Annealing in Atmosphere

Daosen Liu, Shengsheng Wei, Dejun Wang. Improving the Sensing Properties of Graphene MEMS Pressure Sensor by Low-Temperature Annealing in Atmosphere. Sensors, 22(20):8082, 2022. [doi]

Abstract

Abstract is missing.