Yanjie Liu, Mingyue Wu, Guobao Xu, Lining Sun. Frame vibration suppression for wafer transfer system. In 8th International Conference on Ubiquitous Robots and Ambient Intelligence, URAI 2011, Incheon, Korea (South), November 23-26, 2011. pages 87-91, IEEE, 2011. [doi]
Abstract is missing.