A Hybrid Eigenmode Restoration Algorithm for Computational Lithography Problems Based on Mode Matching Principle

Jia Liu, Qun Yu Xu, Min Su, Ning Fang, Bao Fa Wang. A Hybrid Eigenmode Restoration Algorithm for Computational Lithography Problems Based on Mode Matching Principle. IEEE Access, 10:45799-45810, 2022. [doi]

Abstract

Abstract is missing.