Sufficient Hydroxylation Surface-Activation for Low-Temperature Glass/Glass Direct Bonding

Linjie Liu, Xiaohui Yuan, Yu Du, Chenxi Wang. Sufficient Hydroxylation Surface-Activation for Low-Temperature Glass/Glass Direct Bonding. In IEEE International Conference on Integrated Circuits, Technologies and Applications, ICTA 2023, Hefei, China, October 27-29, 2023. pages 79-80, IEEE, 2023. [doi]

Abstract

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