An Adversarial Active Sampling-Based Data Augmentation Framework for AI-Assisted Lithography Modeling

Mingjie Liu, Haoyu Yang, Brucek Khailany, Haoxing Ren. An Adversarial Active Sampling-Based Data Augmentation Framework for AI-Assisted Lithography Modeling. In IEEE/ACM International Conference on Computer Aided Design, ICCAD 2023, San Francisco, CA, USA, October 28 - Nov. 2, 2023. pages 1-9, IEEE, 2023. [doi]

Authors

Mingjie Liu

This author has not been identified. Look up 'Mingjie Liu' in Google

Haoyu Yang

This author has not been identified. Look up 'Haoyu Yang' in Google

Brucek Khailany

This author has not been identified. Look up 'Brucek Khailany' in Google

Haoxing Ren

This author has not been identified. Look up 'Haoxing Ren' in Google