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A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings

Huan Liu, Shuming Yang, Yulong Zhao, Zhuangde Jiang, Yan Liu, Bian Tian. A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings. Sensors, 13(10):13178-13191, 2013. [doi]

Authors

Huan Liu

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Shuming Yang

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Yulong Zhao

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Zhuangde Jiang

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Yan Liu

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Bian Tian

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