A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings

Huan Liu, Shuming Yang, Yulong Zhao, Zhuangde Jiang, Yan Liu, Bian Tian. A Micro-Force Sensor with Slotted-Quad-Beam Structure for Measuring the Friction in MEMS Bearings. Sensors, 13(10):13178-13191, 2013. [doi]

Abstract

Abstract is missing.