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Implementation of Artificial Intelligence Chatbot in Semiconductor Manufacturing to Optimize Overall Equipment Effectiveness

Siu Hong Loh, Vincent Jascha Jeuk, Jia-Jia Sim, Kim Ho Yeap. Implementation of Artificial Intelligence Chatbot in Semiconductor Manufacturing to Optimize Overall Equipment Effectiveness. In 13th IEEE International Conference on Control System, Computing and Engineering, ICCSCE 2023, Penang, Malaysia, August 25-26, 2023. pages 220-225, IEEE, 2023. [doi]

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