Woong-Kee Loh, Young-Kuk Kim. Robust Fault Analysis Using Sensors in Semiconductor Manufacturing Processes. In IEEE International Conference on Internet of Things (iThings) and IEEE Green Computing and Communications (GreenCom) and IEEE Cyber, Physical and Social Computing (CPSCom) and IEEE Smart Data (SmartData), iThings/GreenCom/CPSCom/SmartData 2018, Halifax, NS, Canada, July 30 - August 3, 2018. pages 933-934, IEEE, 2018. [doi]
Abstract is missing.