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Alternative Post-Processing on a CMOS Chip to Fabricate a Planar Microelectrode Array

Francisco López-Huerta, Agustín Leobardo Herrera-May, Johan J. Estrada-López, Carlos Zuñiga-Islas, Blanca Cervantes-Sanchez, Enrique Soto, Blanca S. Soto-Cruz. Alternative Post-Processing on a CMOS Chip to Fabricate a Planar Microelectrode Array. Sensors, 11(11):10940-10957, 2011. [doi]

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