Andriy Lotnyk, D. Poppitz, U. Ross, J. W. Gerlach, F. Frost, S. Bernütz, E. Thelander, B. Rauschenbach. Focused high- and low-energy ion milling for TEM specimen preparation. Microelectronics Reliability, 55(9-10):2119-2125, 2015. [doi]
Abstract is missing.