Feedback control of surface roughness of GaAs [001] thin films using kinetic Monte-Carlo models

Yiming Lou, Panagiotis D. Christofides. Feedback control of surface roughness of GaAs [001] thin films using kinetic Monte-Carlo models. In Proceedings of the 2004 American Control Conference, ACC 2004, Boston, MA, USA, June 30 - July 2, 2004. pages 940-945, IEEE, 2004. [doi]

Abstract

Abstract is missing.