Control configuration selection and distributed nonlinear control of surface roughness in a sputtering process - researchr publication authors

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Yiming Lou, Gangshi Hu, Panagiotis D. Christofides. Control configuration selection and distributed nonlinear control of surface roughness in a sputtering process. In 46th IEEE Conference on Decision and Control, CDC 2007, New Orleans, LA, USA, December 12-14, 2007. pages 231-238, IEEE, 2007. [doi]

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