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Zhi-Feng Lou, Xiu-Peng Hao, Yin-Di Cai, Tien-Fu Lu, Xiao Dong Wang, Kuang-Chao Fan. An Embedded Sensor System for Real-Time Detecting 5-DOF Error Motions of Rotary Stages. Sensors, 19(13):2855, 2019. [doi]
Abstract is missing.