K. K. Low, Stephen W. Director. An efficient methodology for building macromodels of IC fabrication processes. IEEE Trans. on CAD of Integrated Circuits and Systems, 8(12):1299-1313, 1989. [doi]
@article{LowD89,
title = {An efficient methodology for building macromodels of IC fabrication processes},
author = {K. K. Low and Stephen W. Director},
year = {1989},
doi = {10.1109/43.44510},
url = {http://doi.ieeecomputersociety.org/10.1109/43.44510},
researchr = {https://researchr.org/publication/LowD89},
cites = {0},
citedby = {0},
journal = {IEEE Trans. on CAD of Integrated Circuits and Systems},
volume = {8},
number = {12},
pages = {1299-1313},
}