Héctor Maldonado Loyo, Luis Niño de Rivera y Oyarzábal. Mixed wet and dry etching techniques for microneedles fabrication. In 8th International Conference on Electrical Engineering, Computing Science and Automatic Control, CCE 2011, Merida City, Mexico, October 26-28, 2011. pages 1-5, IEEE, 2011. [doi]
Abstract is missing.