3-D Hyperintegration and Packaging Technologies for Micro-Nano Systems

Jian-Qiang Lu. 3-D Hyperintegration and Packaging Technologies for Micro-Nano Systems. Proceedings of the IEEE, 97(1):18-30, 2009. [doi]

@article{Lu09-29,
  title = {3-D Hyperintegration and Packaging Technologies for Micro-Nano Systems},
  author = {Jian-Qiang Lu},
  year = {2009},
  doi = {10.1109/JPROC.2008.2007458},
  url = {https://doi.org/10.1109/JPROC.2008.2007458},
  researchr = {https://researchr.org/publication/Lu09-29},
  cites = {0},
  citedby = {0},
  journal = {Proceedings of the IEEE},
  volume = {97},
  number = {1},
  pages = {18-30},
}