A Resonant Pressure Micro Sensor with a Stress Isolation Layer - researchr publication authors

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Yulan Lu, Bo Xie 0006, Qiuxu Wei, Yadong Li, Xiaoqing Shi, Chao Xiang, Deyong Chen, Junbo Wang, Jian Chen. A Resonant Pressure Micro Sensor with a Stress Isolation Layer. In 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018. pages 1-4, IEEE, 2018. [doi]

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