A Resonant Pressure Micro Sensor with a Stress Isolation Layer

Yulan Lu, Bo Xie 0006, Qiuxu Wei, Yadong Li, Xiaoqing Shi, Chao Xiang, Deyong Chen, Junbo Wang, Jian Chen. A Resonant Pressure Micro Sensor with a Stress Isolation Layer. In 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018. pages 1-4, IEEE, 2018. [doi]

Authors

Yulan Lu

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Bo Xie 0006

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Qiuxu Wei

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Yadong Li

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Xiaoqing Shi

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Chao Xiang

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Deyong Chen

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Junbo Wang

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Jian Chen

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