Yulan Lu, Bo Xie 0006, Qiuxu Wei, Yadong Li, Xiaoqing Shi, Chao Xiang, Deyong Chen, Junbo Wang, Jian Chen. A Resonant Pressure Micro Sensor with a Stress Isolation Layer. In 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018. pages 1-4, IEEE, 2018. [doi]
@inproceedings{Lu0WLSXCWC18,
title = {A Resonant Pressure Micro Sensor with a Stress Isolation Layer},
author = {Yulan Lu and Bo Xie 0006 and Qiuxu Wei and Yadong Li and Xiaoqing Shi and Chao Xiang and Deyong Chen and Junbo Wang and Jian Chen},
year = {2018},
doi = {10.1109/ICSENS.2018.8589846},
url = {https://doi.org/10.1109/ICSENS.2018.8589846},
researchr = {https://researchr.org/publication/Lu0WLSXCWC18},
cites = {0},
citedby = {0},
pages = {1-4},
booktitle = {2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018},
publisher = {IEEE},
isbn = {978-1-5386-4707-3},
}