A MOEMS Accelerometer Based on Diffraction Grating with Improved Mechanical Structure

Qianbo Lu, Wenxiu Lian, Shuqi Lou, Chen Wang, Jian Bai, Guoguang Yang. A MOEMS Accelerometer Based on Diffraction Grating with Improved Mechanical Structure. IJAT, 9(5):473-481, 2015. [doi]

Abstract

Abstract is missing.