Rong Lu, Yanhong Wu, Haitao Cheng, Heng Yang, Xinxin Li, Yuelin Wang. Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH. Sensors, 9(4):2470-2477, 2009. [doi]
@article{LuWCYLW09,
title = {Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH},
author = {Rong Lu and Yanhong Wu and Haitao Cheng and Heng Yang and Xinxin Li and Yuelin Wang},
year = {2009},
doi = {10.3390/s90402470},
url = {http://dx.doi.org/10.3390/s90402470},
researchr = {https://researchr.org/publication/LuWCYLW09},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {9},
number = {4},
pages = {2470-2477},
}