Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH

Rong Lu, Yanhong Wu, Haitao Cheng, Heng Yang, Xinxin Li, Yuelin Wang. Fabrication of Submicron Beams with Galvanic Etch Stop for Si in TMAH. Sensors, 9(4):2470-2477, 2009. [doi]

Abstract

Abstract is missing.