A Triaxial MEMS Capacitive Accelerometer With Efficient Temperature Hysteresis Compensation Based on a Modified Prandtl-Ishlinskii Model

Hongbin Lu, Jiaqi Wang, Zhaohan Li, Zekai Chen, Jicheng Yang, Zhikang Ma, Yuchun Chang 0001. A Triaxial MEMS Capacitive Accelerometer With Efficient Temperature Hysteresis Compensation Based on a Modified Prandtl-Ishlinskii Model. IEEE Trans. Circuits Syst. I Regul. Pap., 73(8):5050-5063, August 2026. [doi]

Abstract

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