Self-Calibrated Absolute Thickness Measurement of Opaque Specimen Based on Differential White Light Interferometry

Xu Lu, Yonggui Yuan, Chi Ma, Haibo Zhu, Yunlong Zhu, Zhangjun Yu, Xiaojun Zhang, Fuqiang Jiang, Jianzhong Zhang, Hanyang Li, Jun Yang 0024, Libo Yuan. Self-Calibrated Absolute Thickness Measurement of Opaque Specimen Based on Differential White Light Interferometry. IEEE T. Instrumentation and Measurement, 69(5):2507-2514, 2020. [doi]

Abstract

Abstract is missing.