Hu Lu, Botong Zhao, Jiwei Shen, Hongjian Zhan, Shujing Lyu, Yue Lu 0001. Learning to Detect Lithography Defects in SEM Images. In Apostolos Antonacopoulos, Subhasis Chaudhuri, Rama Chellappa, Cheng-Lin Liu 0001, Saumik Bhattacharya, Umapada Pal 0001, editors, Pattern Recognition - 27th International Conference, ICPR 2024, Kolkata, India, December 1-5, 2024, Proceedings, Part V. Volume 15305 of Lecture Notes in Computer Science, pages 94-109, Springer, 2024. [doi]
Abstract is missing.