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Microfabrication and Integration of a Sol-Gel PZT Folded Spring Energy Harvester

Jonathan Lueke, Ahmed O. Badr, Edmond Lou, Walied A. Moussa. Microfabrication and Integration of a Sol-Gel PZT Folded Spring Energy Harvester. Sensors, 15(6):12218-12241, 2015. [doi]

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