A self-resonant MEMS-based electrostatic field sensor

Kent H. Lundberg, John S. Shafran, Jinbo Kuang, Mike Judy, Timothy Allman Denison. A self-resonant MEMS-based electrostatic field sensor. In American Control Conference, ACC 2006, Minneapolis, MN, USA, 14-16 June, 2006. IEEE, 2006. [doi]

Authors

Kent H. Lundberg

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John S. Shafran

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Jinbo Kuang

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Mike Judy

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Timothy Allman Denison

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