A self-resonant MEMS-based electrostatic field sensor

Kent H. Lundberg, John S. Shafran, Jinbo Kuang, Mike Judy, Timothy Allman Denison. A self-resonant MEMS-based electrostatic field sensor. In American Control Conference, ACC 2006, Minneapolis, MN, USA, 14-16 June, 2006. IEEE, 2006. [doi]

@inproceedings{LundbergSKJD06,
  title = {A self-resonant MEMS-based electrostatic field sensor},
  author = {Kent H. Lundberg and John S. Shafran and Jinbo Kuang and Mike Judy and Timothy Allman Denison},
  year = {2006},
  doi = {10.1109/ACC.2006.1656384},
  url = {https://doi.org/10.1109/ACC.2006.1656384},
  researchr = {https://researchr.org/publication/LundbergSKJD06},
  cites = {0},
  citedby = {0},
  booktitle = {American Control Conference, ACC 2006, Minneapolis, MN, USA, 14-16 June, 2006},
  publisher = {IEEE},
}