基于卷积去噪自编码器的芯片表面弱缺陷检测方法 (Detection Method of Chip Surface Weak Defect Based on Convolution Denoising Auto-encoders)

Yuetong Luo, Jingshuai Bian, Meng Zhang, Yongming Rao, Feng Yan. 基于卷积去噪自编码器的芯片表面弱缺陷检测方法 (Detection Method of Chip Surface Weak Defect Based on Convolution Denoising Auto-encoders). 计算机科学, 47(2):118-125, 2020. [doi]

Authors

Yuetong Luo

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Jingshuai Bian

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Meng Zhang

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Yongming Rao

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Feng Yan

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