Modeling and implementation of an innovative micro proximity sensor using micromachining technology - researchr publication authors

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Ren C. Luo, Zhenhai Chen. Modeling and implementation of an innovative micro proximity sensor using micromachining technology. In Proceedings of 1993 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 1993, Tokyo, Japan, July 26 - 30, 1993. pages 1709-1716, IEEE, 1993. [doi]

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