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Interferometric Measurement of the Diameter of a Silicon Sphere With a Mechanical Scanning Method

Zhiyong Luo, Yingzi Gu, Jitao Zhang, Lifeng Yang, Ligong Guo. Interferometric Measurement of the Diameter of a Silicon Sphere With a Mechanical Scanning Method. IEEE T. Instrumentation and Measurement, 59(11):2991-2996, 2010. [doi]

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