Vibration Characteristic Measurement Method of MEMS Gyroscopes in Vacuum, High and Low Temperature Environment and Verification of Excitation Method

Wenhao Luo, Wei Su, Zhenhua Nie, Qinwen Huang, Shiyuan Li, Xianshan Dong. Vibration Characteristic Measurement Method of MEMS Gyroscopes in Vacuum, High and Low Temperature Environment and Verification of Excitation Method. IEEE Access, 9:129582-129593, 2021. [doi]

Abstract

Abstract is missing.