Zhifang Luo, Shuai Shao, Tao Wu. AlN Contour Mode Resonators with Half Circle Shaped Reflectors. In 16th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2021, Xiamen, China, April 25-29, 2021. pages 1255-1258, IEEE, 2021. [doi]
Abstract is missing.