Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation

Ming Lyu, Jian Zhao, Najib Kacem, Bin Tang, Pengbo Liu, Jiahao Song, Heng Zhong, Yu Huang. Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation. Commun. Nonlinear Sci. Numer. Simul., 103:105960, 2021. [doi]

@article{LyuZKTLSZH21,
  title = {Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation},
  author = {Ming Lyu and Jian Zhao and Najib Kacem and Bin Tang and Pengbo Liu and Jiahao Song and Heng Zhong and Yu Huang},
  year = {2021},
  doi = {10.1016/j.cnsns.2021.105960},
  url = {https://doi.org/10.1016/j.cnsns.2021.105960},
  researchr = {https://researchr.org/publication/LyuZKTLSZH21},
  cites = {0},
  citedby = {0},
  journal = {Commun. Nonlinear Sci. Numer. Simul.},
  volume = {103},
  pages = {105960},
}