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Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation

Ming Lyu, Jian Zhao, Najib Kacem, Bin Tang, Pengbo Liu, Jiahao Song, Heng Zhong, Yu Huang. Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation. Commun. Nonlinear Sci. Numer. Simul., 103:105960, 2021. [doi]

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