Towards high resolution pico-projector applications: Design improvements on MEMS scanning mirror

Wei Ma, Ho-Yin Chan, Chun Cheong Wong, C. Yiu, Yick Chuen Chan, F. C. S. Lee. Towards high resolution pico-projector applications: Design improvements on MEMS scanning mirror. In 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, February 20-23, 2011. pages 831-834, IEEE, 2011. [doi]

Abstract

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