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An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography

Zhen Ma, David M. Klymyshyn, Sven Achenbach, Martin Börner, Nina Dambrowsky, Jürgen Mohr. An Ultra-Deep High-Q Microwave Cavity Resonator Fabricated Using Deep X-Ray Lithography. IEICE Transactions, 90-C(12):2192-2197, 2007. [doi]

Authors

Zhen Ma

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David M. Klymyshyn

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Sven Achenbach

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Martin Börner

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Nina Dambrowsky

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Jürgen Mohr

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