Chengyu Ma, Binghe Ma, Jinjun Deng, Xinhang Jin. A study of directional MEMS dual-fences gauge. In 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2015, Xi'an, China, April 7-11, 2015. pages 449-452, IEEE, 2015. [doi]
Abstract is missing.