A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated Temperature Compensation Scheme

Rong-Hua Ma, Dung-An Wang, Tzu-Han Hsueh, Chia-Yen Lee. A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated Temperature Compensation Scheme. Sensors, 9(7):5460-5476, 2009. [doi]

Abstract

Abstract is missing.